VMIO-SECS Router / Gateway
SECS/GEM is the main core of ViewMove. ViewMove provides various SECS/GEM connection solutions, including SECS/GEM Router / Gateway package software. If the device does not have the SECS function, the two parties can achieve the system integration of the SECS function through data exchange methods such as SDK, Regedit, and PLC. The Router / Gateway package software is a message forwarding function built on the SECS module.
- Supports up to 12 sets of SECS entity connections (Description use 4 sets of entity connections for the customer's actual machine case)
- CIM / IT EAP software can send and receive connections from different SECS entities at the same time.
- No need to modify the original machine SECS cargo flow control, VID monitoring, event and other settings.
- The machine can be equipped with an additional value collector and upload the value to the Host through SECS.
- Timer can be used to periodically poll specified data and values.
- Can simulate Host command format and test software related functions.
- Can integrate multiple sets of messages from different SECS connections.
- Can set SECS-II message transfer rules between each entity
- Support the function of data filtering, which can filter the necessary information before sending the information to the specified entity.
- Can set/read VM-ReDAM data and convert to standard SECS/GEM SVID.
- Flexible setting of SECS message delivery method.
- Data collection rules can be set to forward messages to designated entities
- When the specified entity sends a specific message, the SECS message forwards the initial data tracking to the specified entity.
- Data polling action and data tracking can be performed, and the polled data will be returned to the specified entity.
- Data collection rules When the program script is triggered when the data condition is met, the SECS message is stored in the internal memory in the form of XML, which is convenient for the program script to retrieve the data.
- SECS Log files and message quantity statistics for each entity
- Automatic connection mode setting status.
- The status of the current SECS connection.
- Number of Primary messages received.
- Number of Primary messages sent.
- Number of Secondary messages received.
- Number of Secondary messages sent.
- Number of failed messages.
- Provide complete product manuals and education and training services
- Real-time professional technical support to quickly complete product development.
Actual case description
This case requires:
(1) The original machine has SECS function, but the original factory no longer provides SECS upgrade and modification services.
(2) The machine needs an external value receiver to monitor current, voltage, flow, pressure, temperature and other data.
(3) The machine needs to monitor whether the heating and cooling conditions are met within a certain period of time, and proactively report corresponding events or abnormal alarms.
(4) The Host only uses one set of EAP systems and needs to complete the integrated control of the machine and monitoring values.
Entity | Description | Introduction |
P0 : EQP | Machine equipment side. | The device was originally connected to the SECS function. |
P1 : EAP | CIM automation control program. | Receive host commands and report events to the host. |
P2 : ADC | Additional sensor data collection. | Machine sensor signal value collection. For example: voltage, electric current, temperature, etc. |
P3 : HostDC | Data polling data collection. | Send the data polling command of S1F3 regularly, provide 7 groups of data polling (milliseconds), and can customize the function of testing SML messages. |
- Oven model (actual case of temperature monitoring value collection integration):
(2) The machine needs an external value receiver to monitor temperature data.
(3) The machine needs to monitor whether the heating and cooling conditions are met within a certain period of time, and proactively report corresponding events or abnormal alarms.
(4) The Host only uses one set of EAP systems and needs to complete the integrated control of the machine and monitoring values.
- SECS Router Rules Settings
(1) EAP can execute the value collection requirements of the specified object.
p1 EAP → p2 ADC: Polling (S1F3)、Trace (S2F23)
Note: Without changing the VID setting of p0 EQP, you can define the p2 ADC VID for value collection.
(2) EAP can transmit the specified RCMD to the specified object.
p1 EAP → p2 ADC HostCmd(S2F41): Start temperature monitoring, cancel temperature monitoring.
Start monitoring: Provide parameters such as target temperature and detection range. The software monitors whether the temperature rising and cooling conditions are met, and proactively reports corresponding events or abnormal alarms.
Cancel monitoring: Notify the software to stop the monitoring process.
(3) EAP can set SECS Link Report data from different sources at the same time.
p1 EAP → Send to Script to process S2F33, S2F35, S2F37 Link Report.
Description: You can maintain the SML text file by yourself, and the command can simultaneously set the S2F3x Function of p0 EQP and p2 ADC.
(4) SECS messages from different sources can be sent to each other.
p0 EQP → p1 EAP: The machine can report events to the Host.
p1 EAP → p0 EQP: Host can issue instructions to the machine.
p2 ADC → p1 EAP: ADC can report events to Host.
p3 HostDC → p0 EQP: can simulate Host issuing instructions to the machine.
※ The above software settings can send and receive connections from different SECS entities.
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Data Collection Rules settings
Execution order: from top to bottom. If it is established, it will not be executed further.
(1) When receiving specified events from different sources, customized Script programs can be executed.
When p0 machine reports Chamber1 Start event: DO control output can be executed.
When p2 ADC Temp1 Over event: executable software program logic judgment.
Our Perfomance
- Over the years, we have assisted customers to complete the verification of SECS/GEM functions in the following semiconductor factories.
- TSMC
- ASEKH
